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<a href="index.html">Tomoyuki Takahata</a>
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<li><a href="research.html">Research</a></li>
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<h1>Publication</h1>
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<label for="1" class="accordionitem">International Journal</label>
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<ol>
<li>Hidetoshi Takahashi, Sumihiro Kohyama, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “MEMS highly sensitive and large-area force plate for total ground reaction force measurement of running ant,” Journal of Micromechanics and Microengineering, (10 pages), vol. 34, no. 4, article no. 045006, 2023. <strong>[<a href="https://doi.org/10.1088/1361-6439/ad27f6" target="_blank">Paper</a>]</strong> (Published on 12 March 2024)</li>
<li>Shun Yasunaga, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “MEMS differential pressure sensor with dynamic pressure canceller for precision altitude estimation,” Micromachines, vol. 14, no. 10, article no. 1941 (13 pages), 2023. <strong>[<a href="https://doi.org/10.3390/mi14101941" target="_blank">Paper</a>]</strong> (Published on 18 October 2023)</li>
<li>Hidetoshi Takahashi, Hiroshi Ishido, Akihito Nakai, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “MEMS 6-axis Force Sensor Chip for Spike Pins in Athletic Sports Shoes,” Sensors and Actuators A: Physical, vol. 363, article no. 114702 (12 pages), 2023. <strong>[<a href="https://doi.org/10.1016/j.sna.2023.114702" target="_blank">Paper</a>]</strong> (Available online on 29 September 2023)</li>
<li><u>Tomoyuki Takahata</u>, “Coaxiality evaluation of coaxial imaging system with concentric silicon–glass hybrid lens for thermal and color imaging,” Sensors, vol. 20, no. 20, article no. 5753 (19 pages), 2020. <strong>[<a href="https://doi.org/10.3390/s20205753" target="_blank">Paper</a>]</strong> (Published on 10 October 2020) </li>
<li>Byeongwook Jo, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “An angular accelerometer with high sensitivity and low crosstalk utilizing a piezoresistive cantilever and spiral liquid channels,” IEEE Sensors Journal, vol. 21, no. 3, pp. 2687–2692, 2020. <strong>[<a href="https://doi.org/10.1109/JSEN.2020.3024993" target="_blank">Paper</a>]</strong> (Published online on 21 September 2020) </li>
<li>Shun Yasunaga, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, Isao Shimoyama, and Tetsuo Kan, “Densely arrayed active antennas embedded in vertical nanoholes for backside-illuminated silicon-based broadband infrared photodetection,” Advanced Materials Interfaces, article no. 2001039 (8 pages), 2020. <strong>[<a href="https://doi.org/10.1002/admi.202001039" target="_blank">Paper</a>]</strong> (Published on 17 September 2020) </li>
<li>Hidetoshi Takahashi, Kohsuke Abe, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “MEMS triaxial gyroscope using surface and sidewall doping piezoresistors,” Journal of Micromechanics and Microengineering, vol. 30, no. 10, article no. 105012 (12 pages), 2020. <strong>[<a href="https://doi.org/10.1088/1361-6439/ab9e4d" target="_blank">Paper</a>]</strong> (Published on 15 July 2020) </li>
<li>Thanh-Vinh Nguyen, Yuya Mizuki, Takuya Tsukagoshi, <u>Tomoyuki Takahata</u>, Masaaki Ichiki, and Isao Shimoyama, “MEMS-based pulse wave sensor utilizing piezoresistive cantilever,” Sensors, vol. 20, no. 4, article no. 1052 (10 pages), 2020. <strong>[<a href="https://dx.doi.org/10.3390%2Fs20041052" target="_blank">Paper</a>]</strong> (Published on 15 February 2020) </li>
<li>Hidetoshi Takahashi, Tetsuo Kan, Akihito Nakai, <u>Tomoyuki Takahata</u>, Takanori Usami, and Isao Shimoyama, “Highly sensitive and low-crosstalk angular acceleration sensor using mirror-symmetric liquid ring channels and MEMS piezoresistive cantilevers,” <em>Sensors and Actuators A: Physical</em>, vol. 287, pp. 39-47, 2019. <strong>[<a href="https://doi.org/10.1016/j.sna.2019.01.006" target="_blank">Paper</a>]</strong> (Available online on 8 January 2019) </li>
<li>Thanh-Vinh Nguyen, Ryota Tanii, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “Development of a single-chip elasticity sensor using MEMS-based piezoresistive cantilevers with different tactile properties,” <em>Sensors and Actuators A: Physical</em>, vol. 285, pp. 362-368, 2019. <strong>[<a href="https://doi.org/10.1016/j.sna.2018.11.020" target="_blank">Paper</a>]</strong> (Available online on 23 November 2018)</li>
<li>Yusuke Takei, Ryo Aoki, Takeshi Kobayashi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “Mechanomyogram measurement by lead zirconate titanate-based acoustic sensor,” <em>Japanese Journal of Applied Physics</em>, vol. 57, no. 11S, pp. 11UD09-1-4, 2018. <strong>[<a href="https://doi.org/10.7567/JJAP.57.11UD09" target="_blank">Paper</a>]</strong> (Published on 9 October 2018)</li>
<li>Hidetoshi Takahashi*, Kohsuke Abe*, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “Experimental study of the aerodynamic interaction between the forewing and hindwing of a beetle-type ornithopter,” <em>Aerospace</em>, vol. 5, no. 3, article no. 83, 2018. <strong>[<a href="https://doi.org/10.3390/aerospace5030083" target="_blank">Paper</a>]</strong> (*: equal contribution) (Published on 8 August 2018)</li>
<li>Sumihiro Kohyama, Hidetoshi Takahashi, Satoru Yoshida, Hiroaki Onoe, Kayoko Hirayama-Shoji, Takuya Tsukagoshi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers,” <em>Journal of Micromechanics and Microengineering</em>, vol. 28, no. 4, article no. 045013, 2018. <strong>[<a href="https://doi.org/10.1088/1361-6439/aaabf7" target="_blank">Paper</a>]</strong> (Published on 20 February 2018)</li>
<li>Ken'ei Matsudaira, Thanh-Vinh Nguyen, Kayoko Hirayama Shoji, Takuya Tsukagoshi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “MEMS piezoresistive cantilever for the direct measurement of cardiomyocyte contractile force,” <em>Journal of Micromechanics and Microengineering</em>, vol. 27, no. 10, article no. 105005, 2017. <strong>[<a href="https://doi.org/10.1088/1361-6439/aa8350" target="_blank">Paper</a>]</strong> (Published on 12 September 2017)</li>
<li>Thanh-Vinh Nguyen, Ryohei Kazama, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto and Isao Shimoyama, “A wall shear stress sensor using a pair of sidewall doped cantilevers,” <em>Journal of Micromechanics and Microengineering</em>, vol. 27, no. 7, article no. 075017, 2017. <strong>[<a href="https://doi.org/10.1088/1361-6439/aa736e" target="_blank">Paper</a>]</strong> (Published on 8 June 2017)</li>
<li>Kazuma Matsui, Yusuke Takei, Akira Inaba, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Processing of graphene into a cantilever beam structure using a focused ion beam,” <em>IET Micro & Nano Letters</em>, vol. 11, issue 11, pp. 670-674, 2016. <strong>[<a href="https://doi.org/10.1049/mnl.2016.0198" target="_blank">Paper</a>]</strong> (Published on 31 October 2016)</li>
<li>Taiyu Okatani, Hidetoshi Takahashi, Kentaro Noda, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, Isao Shimoyama, “A tactile sensor using piezoresistive beams for detection of the coefficient of static friction,” <em>Sensors</em>, vol. 16, issue 5, article no. 718, 2016. <strong>[<a href="http://dx.doi.org/10.3390/s16050718" target="_blank">Paper</a>]</strong> (Published online on 18 May 2016)</li>
<li>Akihiro Isozaki, Hidetoshi Takahashi, Hiroto Tamura, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Parallel Helmholtz Resonators for a Planar Acoustic Notch Filter,” <em>Applied Physics Letters</em>, vol. 105, article no. 241907, 2014. <strong>[<a href="http://dx.doi.org/10.1063/1.4904509" target="_blank">Paper</a>]</strong> (Published online on 17 December 2014)</li>
<li> Kentaro Noda, Nguyen Binh-Khiem, Yusuke Takei, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Focal length measurement of a varifocal liquid lens with capacitance detection,” <em>Applied Physics B</em>, vol. 115, no. 1, pp. 69-76, 2013. <strong>[<a href="http://dx.doi.org/10.1007/s00340-013-5574-3" target="_blank">Paper</a>]</strong> (Published online on 16 July 2013)</li>
<li>Seiichi Takamatsu, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Micro-Patterning of A Conductive Polymer and An Insulation Polymer Using The Parylene Lift-Off Method for Electrochromic Displays,” <em>Journal of Micromechanics and Microengineering</em>, vol. 21, no. 7, article no. 075021, 2011. <strong>[<a href="http://dx.doi.org/10.1088/0960-1317/21/7/075021" target="_blank">Paper</a>]</strong> (Published on 21 June 2011) </li>
<li>Seiichi Takamatsu, Hisanori Takano, Nguyen Binh-Khiem, <u>Tomoyuki Takahata</u>, Eiji Iwase, Kiyoshi Matsumoto, and Isao Shimoyama, “Liquid-Phase Packaging of A Glucose Oxidase Solution with Parylene Direct Encapsulation and An Ultraviolet Curing Adhesive Cover for Glucose Sensors,” <em>Sensors</em>, vol. 10, no. 6, pp. 5888-5898, 2010. <strong>[<a href="http://dx.doi.org/10.3390/s100605888" target="_blank">Paper</a>]</strong> (Published on 9 June 2010)</li>
<li><u>Tomoyuki Takahata</u>, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Three-Dimensional Silicon Fabrication using Microloading Effects with Rectangular Aperture Mask,” <em>Journal of Micromechanics and Microengineering</em>, vol. 20, no. 7, article no. 0750022, 2010. <strong>[<a href="http://dx.doi.org/10.1088/0960-1317/20/7/075022" target="_blank">Paper</a>]</strong> (<a href="http://iopscience.iop.org/0960-1317/page/Highlights%20of%202010">Highlights of 2010</a>, <strong>IOP select</strong>, published on 9 June 2010)</li>
<li>Seiichi Takamatsu, <u>Tomoyuki Takahata</u>, Masato Muraki, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Transparent Conductive-Polymer Strain Sensors for Touch Input Sheets of Flexible Displays,” <em>Journal of Micromechanics and Microengineering</em>, vol. 20, no. 7, article no. 075017, 2010. <strong>[<a href="http://dx.doi.org/10.1088/0960-1317/20/7/075017" target="_blank">Paper</a>]</strong> (<a href="http://iopscience.iop.org/0960-1317/page/Highlights%20of%202010">Highlights of 2010</a>, <strong>IOP select</strong>, published on 7 June 2010)</li>
<li><u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, Isao Shimoyama, “A Wide Wavelength Range Optical Switch Using a Flexible Photonic Crystal Waveguide and Silicon Rods,” <em>Journal of Micromechanics and Microengineering</em>, vol. 20, no. 7, article no. 075009, 2010. <strong>[<a href="http://dx.doi.org/10.1088/0960-1317/20/7/075009" target="_blank">Paper</a>]</strong> (Published on 21 May 2010)</li>
<li><u>Tomoyuki Takahata</u>, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Transmittance Tuning of Photonic Crystal Reflectors using an AFM Cantilever,” <em>Sensors and Actuators A: Physical</em>, vol. 128, no. 1, pp. 197-201, 2006. <strong>[<a href="http://dx.doi.org/10.1016/j.sna.2005.12.051" target="_blank">Paper</a>]</strong></li>
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<label for="2" class="accordionitem">Japanese Journal</label>
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<ol>
<li>竹井裕介, 松井亮, グェンミンジュン, <u>高畑智之</u>, 松本潔, 下山勲, “MEMS超音波センサを用いた水中移動物体の速度計測,” <em>電気学会論文誌E</em>, vol. 138, no. 2, pp. 52-58, 2018. <strong>[<a href="http://dx.doi.org/10.1541/ieejsmas.138.54" target="_blank">Paper</a>]</strong> (Published on 1 February 2018)</li>
<li>青木亮, グェンタンヴィン, 野田堅太郎, <u>高畑智之</u>, 松本潔, 下山勲, “水浸型可変焦点音響ミラー,” <em>電気学会論文誌E</em>, vol. 136, no. 9, pp. 390-397, 2016. <strong>[<a href="https://doi.org/10.1541/ieejsmas.136.390" target="_blank">Paper</a>]</strong> (Published on 1 September 2016)</li>
<li><u>高畑智之</u>, 松本潔, 下山勲, “温度画像のための遠赤外線用フレネルレンズ,” <em>電気学会論文誌E</em>, vol. 133, no. 7, pp. 274-279, 2013. <strong>[<a href="http://dx.doi.org/10.1541/ieejsmas.133.274" target="_blank">Paper</a>]</strong> (Published on 1 July 2013)</li>
<li>大平真琴, 森口誠, 佐々木昌, 大場正利, <u>高畑智之</u>, 下山勲, 木股雅章, “マイクロミラーアレーを用いた高感度サーモパイル型赤外線アレーセンサの開発,” <em>電子情報通信学会論文誌C</em>, vol. J94-C, no. 11, pp. 433–440, 2011. <strong>[<a href="https://search.ieice.org/bin/summary.php?id=j94-c_11_433" target="_blank">Paper</a>]</strong> (Published on 1 November, 2011)</li>
<li>高松誠一, <u>高畑智之</u>, 松本潔, 下山勲, “パリレンピールオフ法を用いたPEDOT:PSSパターニング, Patterning PEDOT:PSS with parylene peel-off method,” <em>電気学会論文誌E</em>, vol. 130, no. 8, 2010. <strong>[<a href="http://dx.doi.org/10.1541/ieejsmas.130.394" target="_blank">Paper</a>]</strong> (Published on 1 August 2010)</li>
<li>竹井裕介, 大堀敬広, <u>高畑智之</u>, 菅哲朗, 岩瀬英治, 松本潔, 下山勲, “開口マスクによるシリコン3次元斜面形状の作製, Fabrication of Three Dimensional Silicon Slopes using Mask with Square Openings,” <em>電気学会論文誌E</em>, vol. 130, no. 5, pp.182-187, 2010. <strong>[<a href="http://dx.doi.org/10.1541/ieejsmas.130.182" target="_blank">Paper</a>]</strong> (Published on 1 May 2010)</li>
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<label for="3" class="accordionitem">International Conference Proceedings</label>
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<h2><a name="Conf2022">2022</a></h2>
<li>Daiki Naruse, <u>Tomoyuki Takahata</u>, Yusuke Mukuta, and Tatsuya Harada, “Pop Music Generation with Controllable Phrase Lengths,” <em>23rd International Society for Music Information Retrieval Conference (ISMIR 2022)</em>, Bengaluru, India, 4–8 December, pp. 125–131, 2022.</li>
<h2><a name="Conf2019">2019</a></h2>
<li>Atsuro Okazawa, <u>Tomoyuki Takahata</u>, and Tatsuya Harada, “Simultaneous transparent and non-transparent objects segmentation with multispectral scenes,” <em>The 2019 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2019)</em>, pp. 4977–4984, Macao, China, 4–8 November, 2019. <strong>[<a href="https://doi.org/10.1109/IROS40897.2019.8968095" target="_blank">Proceedings</a>]</strong></li>
<li>Shun Yasunaga, Tetsuo Kan, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “Infrared photodetector with copper resonator in silicon nanohole array,” <em>The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019)</em>, Berlin, Germany, 23–27 June, 2019. <strong>[<a href="https://doi.org/10.1109/TRANSDUCERS.2019.8808478" target="_blank">Proceedings</a>]</strong></li>
<li>Kosuke Abe, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “In-plane gyroscope using a piezoresistive beams with sidewall doping,” <em>The 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)</em>, Seoul, Korea, 27–31 January, 2019. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2019.8870841" target="_blank">Proceedings</a>]</strong></li>
<li>Takehiro Hagiwara, Hidetoshi Takahashi, Thanh-Vinh Nguyen, <u>Tomoyuki Takahata</u>, and I. Shimoyama, “Underwater pitot tube for swimming animals,” <em>The 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)</em>, Seoul, Korea, 27–31 January, 2019. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2019.8870691" target="_blank">Proceedings</a>]</strong></li>
<li>Yasuaki Ishii, Takuya Tsukagoshi, Thanh-Vinh Nguyen, Kayoko Hirayama-Shoji, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “The measurement of the vibration of human iPS cell-derived cardiomyocytes’ contraction,” <em>The 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)</em>, Seoul, Korea, 27–31 January, 2019. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2019.8870869" target="_blank">Proceedings</a>]</strong></li>
<li>Jumpei Shimatani, Hidetoshi Takahashi, Mie Ichihara, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “Monitoring volcanic activity with high sensitive infrasound sensor using a piezoresistive cantilever,” <em>The 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)</em>, Seoul, Korea, 27–31 January, 2019. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2019.8870832" target="_blank">Proceedings</a>]</strong></li>
<li>Byeongwook Jo, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama “Highly sensitive angular accelerometer utilizing piezoresistive cantilever and spiral liquid channel,” <em>The 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)</em>, Seoul, Korea, 27–31 January, 2019. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2019.8870806" target="_blank">Proceedings</a>]</strong></li>
<li>Ryosuke Suzuki, Thanh-Vinh Nguyen, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “A piezoresistive vibration sensor with liquid on corrugated membrane,” <em>The 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)</em>, Seoul, Korea, 27–31 January, 2019. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2019.8870790" target="_blank">Proceedings</a>]</strong></li>
<li>Yuya Mizuki, Thanh-Vinh Nguyen, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “Highly sensitive pulse wave sensor with a piezoresistive cantilever inside an air chamber,” <em>The 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)</em>, Seoul, Korea, 27–31 January, 2019. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2019.8870788" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2018">2018</a></h2>
<li>Takehiro Hagiwara, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama,“Ground effect measurement of butterfly take-off,” <em>IEEE 31th International Conference on Micro Electro Mechanical Systems (MEMS 2018)</em>, pp. 832-835, Belfast, Northern Ireland, 21-25 January, 2018. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2018.8346684" target="_blank">Proceedings</a>]</strong></li>
<li>Ryota Tanii, Thanh-Vinh Nguyen, <u>Tomoyuki Takahata</u> and Isao Shimoyama,“Elasticity sensor using different tactile properties on the chip,” <em>IEEE 31th International Conference on Micro Electro Mechanical Systems (MEMS 2018)</em>, pp. 862-865, Belfast, Northern Ireland, 21-25 January, 2018. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2018.8346692" target="_blank">Proceedings</a>]</strong></li>
<li>Sumihiro Kohyama, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama,“High sensitive and large area force plate for ground reaction force measurement of ant running,” <em>IEEE 31th International Conference on Micro Electro Mechanical Systems (MEMS 2018)</em>, pp. 874-877, Belfast, Northern Ireland, 21-25 January, 2018. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2018.8346695" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2017">2017</a></h2>
<li>Hidetoshi Takahashi, Norimasa Namioka, Thanh-Vinh Nguyen, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “Is there oscillation of ground reaction force during walk of small ants?” SEB Annual Main Meeting 2017, A11.59, Gothenburg, Sweden, 3–6 July, 2017.</li>
<li>Hidetoshi Takahashi, Ryu Furuya, Tomoko Yano, Kei Ito, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Maximum force capacity of legs of a fruit fly during landing motion,” <em>The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)</em>, pp. 1061-1064, Kaohsiung, Taiwan, 18-22 June, 2017. <strong>[<a href="https://doi.org/10.1109/TRANSDUCERS.2017.7994235" target="_blank">Proceedings</a>]</strong></li>
<li>Taiyu Okatani, Akihito Nakai, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “A MEMS slip sensor: estimations of triaxial force and coefficient of static friction for prediction of a slip,” <em>The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)</em>, pp. 75-77, Kaohsiung, Taiwan, 18-22 June, 2017. <strong>[<a href="https://doi.org/10.1109/TRANSDUCERS.2017.7993991" target="_blank">Proceedings</a>]</strong></li>
<li>Ken'ei Matsudaira, Thanh-Vinh Nguyen, Kayoko Hirayama Shoji, Takuya Tsukagoshi, <u>Tomoyuki Takahata</u> and Isao Shimoyama, “MEMS force sensor array for evaluating the contractility of iPS cell-derived cardiomyocytes,” <em>The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)</em>, pp. 36-38, Kaohsiung, Taiwan, 18-22 June, 2017. <strong>[<a href="https://doi.org/10.1109/TRANSDUCERS.2017.7993981" target="_blank">Proceedings</a>]</strong></li>
<li>Taiyu Okatani, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “Evaluation of ground slippery condition during walk of bipedal robot using MEMS slip sensor,” <em>IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS 2017)</em>, Las Vegas, NV, USA, 22-26 January, pp. 1033-1035, 2017. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2017.7863588" target="_blank">Proceedings</a>]</strong></li>
<li>Nobuhiko Matsuda, Nguyen Minh Dung, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “A multi-axis piezoresistive MEMS sensor for acoustic emission,” <em>IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS 2017)</em>, Las Vegas, NV, USA, 22-26 January, pp. 1181-1183, 2017. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2017.7863626" target="_blank">Proceedings</a>]</strong></li>
<li>Sumihiro Kohyama, Hidetoshi Takahashi, Satoru Yoshida, Hiroaki Onoe, Kayoko H. Shoji, Takuya Tsukagoshi, <u>Tomoyuki Takahata</u>, and Isao Shimoyama, “MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles,” <em>The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017)</em>, pp. 1040–1043, Las Vegas, USA, 22–26 January, 2017. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2017.7863590" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2016">2016</a></h2>
<li>Hidetoshi Takahashi, Ryu Furuya, Nguyen Thanh-Vinh, Tomoko Yano, Kei Ito, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Measurement of jumping force of a fruit fly using a MEMS force plate,” <em>SEB Brighton 2016</em>, Brighton, UK, 3–7 July, 2016.</li>
<li><u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Compact coaxial thermal and color imaging system with silicon-glass hybrid lens,” <em> Robotics and Automation (ICRA 2016)</em>, Stockholm, Sweden, 16-21 May, pp. 5555-5560, 2016. <strong>[<a href="https://doi.org/10.1109/ICRA.2016.7487772">Proceedings</a>]</strong></li>
<li>Ryo Aoki, Yusuke Takei, Nguyen Minh-Dung, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Detection of High-Frequency Component of Mechanomyogram,” <em>The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)</em>, Shanghai, China, 24-28 January, pp. 356-358, 2016. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2016.7421634" target="_blank">Proceedings</a>]</strong></li>
<li>Ryohei Kazama, HidetoshiTakahashi, Nguyen Thanh-Vinh, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Sensitivity Enhancement of a Cantilever-type Airflow Shear Stress Sensor via Surface Roughness Modification,” <em>The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)</em>, Shanghai, China, 24-28 January, pp. 839-842, 2016. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2016.7421760" target="_blank">Proceedings</a>]</strong></li>
<li>Wataru Ohnishi, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Cantilever with 10-fold Tunable Spring Constant using Lorentz Force,” <em>The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)</em>, Shanghai, China, 24-28 January, pp. 866-868, 2016. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2016.7421767" target="_blank">Proceedings</a>]</strong></li>
<li>Taiyu Okatani, Hidetoshi Takahashi, Kentaro Noda, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “A Tactile Sensor for Simultaneous Measurement of Applied Force and Friction Coefficient,” <em>The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)</em>, Shanghai, China, 24-28 January, pp. 862-865, 2016. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2016.7421766" target="_blank">Proceedings</a>]</strong></li>
<li>Norimasa Namioka, Yusuke Takei, Nguyen Minh-Dung, Takanori Usami, Nguyen Thanh-Vinh, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Measurment of Vacuum Pressure with Cantilever-based Differential Pressure Sensor utilizing Vapor Pressure and Narrow Gap of Cantilever,” <em>The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)</em>, Shanghai, China, 24-28 January, pp. 836-838, 2016. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2016.7421759" target="_blank">Proceedings</a>]</strong></li>
<li>Huijun Park, Nguyen Thanh-Vinh, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Measuring the vibration of cells subjected to ultrasound using a MEMS-based force sensor array,” <em>The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)</em>, pp. 695–697, Shanghai, China, 24–28 January, 2016. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2016.7421721" target="_blank">Proceedings</a>]</strong></li>
<li>Ryu Furuya, Hidetoshi Takahashi, Nguyen Thanh Vinh, Tomoko Yano, Kei Ito, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Matsumoto, Isao Shimoyama, “Measurement of Jumping Force of a Fruit Fly using a Mesa Structured Force Plate,” <em>The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)</em>, Shanghai, China, 24-28 January, pp. 165-168, 2016. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2016.7421584" target="_blank">Proceedings</a>]</strong></li>
<li>Nobuhiko Matsuda, Nguyen Minh Dung, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “CFRP monitoring method with piezoresistive beams,” <em>The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)</em>, Shanghai, China, 24-28 January, pp. 131-132, 2016. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2016.7421575" target="_blank">Proceedings</a>]</strong></li>
<li>Ken'ei Matsudaira, Nguyen Minh-Dung, Yusuke Takei, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Wood monitoring using MEMS acoustic sensor,” <em>The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)</em>, Shanghai, China, 24-28 January, pp. 1122-1124, 2016. <strong>[<a href="https://doi.org/10.1109/MEMSYS.2016.7421832" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2015">2015</a></h2>
<li>Hidetoshi Takahashi, Shinnosuke Hirakawa, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method,” <em>18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)</em>, Alaska, USA, pp.1089–1092, 21–25 June, 2015. <strong>[<a href="http://dx.doi.org/10.1109/TRANSDUCERS.2015.7181116" target="_blank">Proceedings</a>]</strong></li>
<li><u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Impact-induced hardening package for tactile sensors using dilatant fluid,” <em>The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)</em>, Estoril, Portugal, 18-22 January, pp. 421-422, 2015. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2015.7050979" target="_blank">Proceedings</a>]</strong></li>
<li>Ryo Watanabe, Nguyen Minh-Dung, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Fusion of cantilever and diaphragm pressure sesors according to their frequency characteristics,” <em>The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)</em>, Estoril, Portugal, pp. 212-214, 18-22 January, 2015.<strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2015.7050924" target="_blank">Proceedings</a>]</strong></li>
<li>Ryo Matsui, Yusuke Takei, Nguyen Minh-Dung, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Flow speed measurement with Doppler effect using ultrasonic receiver for small-sized smart catheter,” <em>The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)</em>, Estoril, Portugal, pp. 640-642, 18-22 January, 2015.<strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2015.7051037" target="_blank">Proceedings</a>]</strong></li>
<li>Tomonori Kaneko, Nguyen Minh-Dung, Pham Quang-Khang, Yusuke Takei, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Pulse wave measurement in human using piezoresistive cantilever on liquid,” <em>The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)</em>, Estoril, Portugal, pp. 670-673, 18-22 January, 2015.<strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2015.7051046" target="_blank">Proceedings</a>]</strong></li>
<li>Ryo Aoki, Nguyen Thanh-Vinh, Kentaro Noda, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Sound focusing in liquid using a varifocal acoustic lens,” <em>The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)</em>, Estoril, Portugal, pp. 925-927, 18-22 January, 2015.<strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2015.7051111" target="_blank">Proceedings</a>]</strong></li>
<li>Chie Suzuki, Yusuke Takei, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Measuring the propagating teeth vibration of human chewing,” <em>The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)</em>, Estoril, Portugal, pp. 646-648, 18-22 January, 2015.<strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2015.7051039" target="_blank">Proceedings</a>]</strong></li>
<li>Ryohei Kazama, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Airflow shear stress sensor using side-wall doped piezoresistive plate,” <em>The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)</em>, Estoril, Portugal, pp. 710-713, 18-22 January, 2015.<strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2015.7051056" target="_blank">Proceedings</a>]</strong></li>
<li>Hiroshi Ishido, Hidetoshi Takahashi, Akihito Nakai, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “6-axis force/torque sensor for spike pins of sports shoes,” <em>The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)</em>, Estoril, Portugal, pp. 257-260, 18-22 January, 2015.<strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2015.7050937" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2014">2014</a></h2>
<li>Takahiro Suzuki, Yasumasa Ichikawa, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto and Isao Shimoyama, “Calorimetric device for non-destructive measurement of the thermal diffusivity dependency by phase delay,” <em>The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)</em>, San Francisco, USA, pp. 1151-1154, 26-30 January, 2014. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2014.6765850" target="_blank">Proceedings</a>]</strong></li>
<li>Dinh Hoang-Giang, Nguyen Thanh-Vinh, Kentaro Noda, Phan Hoang-Phuong, Nguyen Binh-Khiem, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Micro liquid-based thermo-acoustic transmitter for emitting ultrasound in liquid medium,” <em>The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)</em>, San Francisco, USA, pp. 849-852, 26-30 January, 2014. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2014.6765753" target="_blank">Proceedings</a>]</strong></li>
<li>Kazuma Matsui, Akira Inaba, Yuta Oshidari, Yusuke Takei, Hidetoshi Takahashi, <u>Tomoyuki Takahata</u>, Reo Kometani, Kiyoshi Matsumoto and Isao Shimoyama, “Mechanical properties of few layer graphene cantilever,” <em>The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)</em>, San Francisco, USA, pp. 1087-1090, 26-30 January, 2014. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2014.6765834" target="_blank">Proceedings</a>]</strong></li>
<li>Tomonori Kaneko, Nguyen Minh-Dung, Ryo Aoki, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto and Isao Shimoyama, “Measurement of mechanomyogram,” <em>The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)</em>, San Francisco, USA, pp. 845-848, 26-30 January, 2014. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2014.6765773" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2013">2013</a></h2>
<li><u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “ A silicon-glass hybrid lens for simultaneous color-and-thermal imaging,” <em> The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013)</em>, pp. 1408-1411, Barcelona, Spain, 16-20 June, 2013. <strong>[<a href="http://dx.doi.org/10.1109/Transducers.2013.6627042" target="_blank">Proceedings</a>]</strong></li>
<li>Kentaro Noda, Nguyen Binh-Khiem, Yusuke Takei, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “ Multi-axial confocal distance sensor using varifocal liquid lens,” <em> The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013)</em>, pp. 1499-1502, Barcelona, Spain, 16-20 June, 2013. <strong>[<a href="http://dx.doi.org/10.1109/Transducers.2013.6627065" target="_blank">Proceedings</a>]</strong></li>
<li>Yoshinori Yokoyama, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “ Micropartilces In Silicon Film Using Mist-Jet Technology For A Photodetector,” <em>The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013)</em>, pp. 279-282, Taipei, Taiwan, 20-24 January, 2013. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2013.6474232" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2012">2012</a></h2>
<li>Kentaro Noda, Nguyen Binh-Khiem, Yusuke Takei, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Confocal Distance Sensor with Varifocal Liquid Lens,”<em>The 7th IEEE Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012)</em>, pp. 432-433, Kyoto, Japan, 5-8 March, 2012.</li>
<h2><a name="Conf2011">2011</a></h2>
<li>Nguyen Minh Dung, Hidetoshi Takahashi, Kenta Kuwana, <u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “3D Airflow Velocity Vector Sensor,” <em>The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011)</em>, pp. 513-516, Cancun, Mexico, 23-27 January, 2011. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2011.5734474" target="_blank">Proceedings</a>]</strong></li>
<li>Makoto Ohira, Yutaka Koyama, Fumiji Aita, Sho Sasaki, Masatoshi Oba, Isao Shimoyama, <u>Tomoyuki Takahata</u>, and Masafumi Kimata, “Micro Mirror Arrays for Improved Sensitivity of Thermopile Infrared Sensors,” <em>The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011)</em>, pp. 708-711, Cancun, Mexico, 23-27 January, 2011. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2011.5734523" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2009">2009</a></h2>
<li><u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, Isao Shimoyama, “Tilted Paraboloidal Reflective Lens for Far Infrared Sensor Fabricated by Mask with Rectangular Openings,” <em>The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009)</em>, pp. 975-978, Sorrento, Italy, January 26-29, 2009. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2009.4805548" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2008">2008</a></h2>
<li>Hiroyuki Kojo, Nguyen Binh-Khiem, <u>Tomoyuki Takahata</u>, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Varifocal Infrared Imaging Lens by Parylene-on-Liquid-Deposition,” <em>Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT 2008)</em>, 2S32, Tainan, Taiwan, June 22-25, 2008.</li>
<li>Hisashi Terae, Nguyen Binh-Khiem, <u>Tomoyuki Takahata</u>, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, “Tapered Waveguide by Liquid for a Coupler of Optical Fibers to MEMS Devices,” <em>The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008)</em>, pp. 794-797, Tucson, Arizona, USA, January 13-17, 2008. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2008.4443776" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2007">2007</a></h2>
<li><u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, and Isao Shimoyama, “Effect of Slab Deflection on a Mechano-Optic Modulator,” <em>4th International Conference on Group IV Photonics (GFP 2007)</em>, pp. 46-48, Tokyo, Japan, September 19-21, 2007.</li>
<h2><a name="Conf2006">2006</a></h2>
<li><u>Tomoyuki Takahata</u>, Kiyoshi Matsumoto, Isao Shimoyama, “Mechanical Tuning of 2D Photonic Crystal with MEMS-based Electrostatic Actuator,” <em>The 19th Annual Meeting of the IEEE Lasers & Electro-Optics Society (LEOS 2006)</em>, Montreal, Canada, October 29-November 2, 2006.</li>
<li><u>Tomoyuki Takahata</u>, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Photonic Crystal Attenuator with A Flexible Waveguide and Nano-Rods,” <em>The 19th International Conference on Micro Electro Mechanical Systems (MEMS 2006)</em>, pp. 834-837, Istanbul, Turkey, January 22-26, 2006. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2006.1627929" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2005">2005</a></h2>
<li><u>Tomoyuki Takahata</u>, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Photonic Crystal Tuned by Cantilever,” <em>The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005)</em>, pp. 112-115, Miami, Florida, USA, January 30-February 3, 2005. <strong>[<a href="http://dx.doi.org/10.1109/MEMSYS.2005.1453880" target="_blank">Proceedings</a>]</strong></li>
<h2><a name="Conf2004">2004</a></h2>
<li><u>Tomoyuki Takahata</u>, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama, “Surface Acoustic Wave Optical Deflector for Surface Plasmon Resonance Sensor,” <em>2004 IEEE/LEOS International Conference on Optical MEMS (OpticalMEMS 2004)</em> and Their Applications, pp. 70-71, Takamatsu, Japan, August 22-26, 2004.</li>
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<label for="4" class="accordionitem">Instruction papers (in Japanese)</label>
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<li><u>高畑智之</u>, “可視・長波長赤外同軸カメラと透明物検出への応用,” <em>日本ロボット工業会機関誌「ロボット」</em>, no. 268, pp. 56-58, 2022. <strong>[<a href="https://www.jara.jp/publications/robot/img/robot268.pdf" target="_blank">PDF of index</a>]</strong> (Published on 20 September 2022)</li>
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