diff --git a/lib/compiler/src/compile.erl b/lib/compiler/src/compile.erl
index 1c66f80481cf..7ef44ef05200 100644
--- a/lib/compiler/src/compile.erl
+++ b/lib/compiler/src/compile.erl
@@ -1919,7 +1919,7 @@ metadata_add_features(Ftrs, #compile{extra_chunks = Extra} = St) ->
         proplists:from_map(maps:put(?META_USED_FEATURES, NewFtrs,
                                     proplists:to_map(MetaData))),
     Extra1 = proplists:from_map(maps:put(?META_CHUNK_NAME,
-                                         erlang:term_to_binary(MetaData1),
+                                         term_to_binary(MetaData1, [deterministic]),
                                          proplists:to_map(Extra))),
     St#compile{extra_chunks = Extra1}.
 
@@ -2467,8 +2467,8 @@ debug_info_chunk(#compile{mod_options=ModOpts0,
             false ->
                 {erl_abstract_code,{none,AbstOpts},ModOpts0}
         end,
-    DebugInfo = erlang:term_to_binary({debug_info_v1,Backend,Metadata},
-                                      [compressed]),
+    DebugInfo = term_to_binary({debug_info_v1,Backend,Metadata},
+                               [deterministic, compressed]),
     {DebugInfo, ModOpts}.
 
 encrypt_debug_info(DebugInfo, Key, Opts) ->